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Evaluation of elastic properties of DLC films using substrate etching techniques

Other Titles

기판 etching 기법을 이용한 DLC 필름의 탄성특성 평가

Authors

조성진; 이광렬; 은광용; 한준희; 고대홍

Issue Date

1998-01

Citation

요업학회지 = Journal of the Korean Ceramic Society, v.35, no.8, pp.813 - 818

Keywords

다이아몬드상 카본; 탄성계수; 잔류응력; DLC films; elastic modulus; poisson' s ratio; nano-indenataion

URI

https://pubs.kist.re.kr/handle/201004/143350

Appears in Collections:

KIST Article > Others

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