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Processing and characterization of a direct bonded SOI using SiO//2 Thin Film

Other Titles

SiO//2 박막을 이용한 SOI 직접접합공정 및 특성

Authors

신동운; 최두진; 김긍호

Issue Date

1998-01

Publisher

한국세라믹학회

Citation

한국세라믹학회지 = Journal of the Korean Ceramic Society, v.35, no.6, pp.535 - 542

Keywords

SOI(Silicon on Insulator)

ISSN

1229-7801

URI

https://pubs.kist.re.kr/handle/201004/143358

Appears in Collections:

KIST Article > Others

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