Auger electron spectroscopy investigation of the chemical shifts of tin and tin oxides

Abstract

The Auger spectra of tin, the oxides SnO2, and the nonstoichiometric SnOx thin films grown by reactive ion-assisted deposition have been studied. The Anger transition peaks of O K L2,3L2,3 and Sn M4N4,5N4,5 were used to determine the surface composition and Sn valency for the different tin oxides. Chemical shifts on the order of 1.08-1.1 eV per Sn valency were observed.