KIST Library Institutional Repository

Mo- 화합물의 확산방지막으로서의 성질에 관한 연구

Other Titles

Diffusion barrier properties of mo compound thin films

Authors

김지형; 이용혁; 권용성; 염근영; 송종한

Issue Date

1997-05

Publisher

한국진공학회

Citation

한국진공학회지, v.6, no.2, pp.143 - 150

Keywords

diffusion barrier

ISSN

1225-8822

URI

https://pubs.kist.re.kr/handle/201004/143822

Appears in Collections:

KIST Article > Others

Files in This Item:

There are no files associated with this item.

Export

RIS (EndNote)

XLS (Excel)

XML