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dc.contributor.authorLee, S-
dc.contributor.authorLee, S-
dc.contributor.authorLee, S-
dc.contributor.authorJeon, D-
dc.contributor.authorLee, KR-
dc.date.accessioned2024-01-21T18:38:07Z-
dc.date.available2024-01-21T18:38:07Z-
dc.date.created2021-09-04-
dc.date.issued1997-03-
dc.identifier.issn1071-1023-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/143930-
dc.description.abstractSilicon field emitter tips are coated with diamondlike carbon (DLC) film. Argon-ion bombardment of the tips increased the aspect ratio and helped uniform DLC coating. Using DLC-coated tips, we have fabricated a self-aligned gated field emission array. (C) 1997 American Vacuum Society.-
dc.languageEnglish-
dc.publisherA V S AMER INST PHYSICS-
dc.subjectFIELD-
dc.titleSelf-aligned silicon tips coated with diamondlike carbon-
dc.typeArticle-
dc.identifier.doi10.1116/1.589598-
dc.description.journalClass1-
dc.identifier.bibliographicCitationJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.15, no.2, pp.457 - 459-
dc.citation.titleJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B-
dc.citation.volume15-
dc.citation.number2-
dc.citation.startPage457-
dc.citation.endPage459-
dc.description.journalRegisteredClassscie-
dc.description.journalRegisteredClassscopus-
dc.identifier.wosidA1997WU26700053-
dc.identifier.scopusid2-s2.0-9144246347-
dc.relation.journalWebOfScienceCategoryEngineering, Electrical & Electronic-
dc.relation.journalWebOfScienceCategoryNanoscience & Nanotechnology-
dc.relation.journalWebOfScienceCategoryPhysics, Applied-
dc.relation.journalResearchAreaEngineering-
dc.relation.journalResearchAreaScience & Technology - Other Topics-
dc.relation.journalResearchAreaPhysics-
dc.type.docTypeArticle; Proceedings Paper-
dc.subject.keywordPlusFIELD-
dc.subject.keywordAuthorDLC-
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