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Self-aligned silicon tips coated with diamondlike carbon

Authors
Lee, S; Lee, S; Lee, S; Jeon, D; Lee, KR
Issue Date
1997-03
Publisher
A V S AMER INST PHYSICS
Citation
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.15, no.2, pp.457 - 459
Abstract
Silicon field emitter tips are coated with diamondlike carbon (DLC) film. Argon-ion bombardment of the tips increased the aspect ratio and helped uniform DLC coating. Using DLC-coated tips, we have fabricated a self-aligned gated field emission array. (C) 1997 American Vacuum Society.
Keywords
FIELD; FIELD; DLC
ISSN
1071-1023
URI
https://pubs.kist.re.kr/handle/201004/143930
DOI
10.1116/1.589598
Appears in Collections:
KIST Article > Others
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