Fabrication and field emission study of gated diamondlike-carbon-coated silicon tips

Abstract

We have fabricated a gated silicon held emitter array for which the silicon tips are coated with a diamondlike-carbon him (DLC). Silicon oxide disks were patterned on the silicon substrate, and the tips were formed using conventional dry etching. With the oxide caps covering the tips, the insulating layer, molybdenum gate film, and aluminum parting layer were deposited. At this stage the oxide caps were removed to expose the silicon tips and a DLC-carbon film was deposited onto the tips. (C) 1997 American Vacuum Society.