Micropattern generation by holographic lithography and fabrication of quantum wire array by MOCVD.

Other Titles
홀로그래픽 리소그래피에 의한 미세패턴 형성과 MOCVD 에 의한 양자세선 어레이의 제작 =
Authors
임현식김용김무성민석기김태근조성우박정호
Issue Date
1996-01
Citation
대한전자공학회 논문지, v.v. 33, no.no. 6, pp.222 - ?
Keywords
MOCVD
URI
https://pubs.kist.re.kr/handle/201004/144595
Appears in Collections:
KIST Article > Others
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