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dc.contributor.author고석근-
dc.contributor.author윤경렬-
dc.contributor.author김석-
dc.contributor.author최두진-
dc.contributor.author김기환-
dc.date.accessioned2024-01-21T20:02:42Z-
dc.date.available2024-01-21T20:02:42Z-
dc.date.created2022-01-10-
dc.date.issued1996-01-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/144671-
dc.titleChemical vapor deposition of copper films : influence of the seeding layers.-
dc.typeArticle-
dc.description.journalClass3-
dc.identifier.bibliographicCitationMat. res. soc. proc., v.v. 427, pp.225 - ?-
dc.citation.titleMat. res. soc. proc.-
dc.citation.volumev. 427-
dc.citation.startPage225-
dc.citation.endPage?-
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