DSpace at KIST: 100 ㎚ electron beam lithography using a modified scanning electron microscope.

Full metadata record

DC Field	Value	Language
dc.contributor.author	김성일	-
dc.contributor.author	민석기	-
dc.contributor.author	김은규	-
dc.contributor.author	최범호	-
dc.contributor.author	황성우	-
dc.contributor.author	정석구	-
dc.contributor.author	김태근	-
dc.date.accessioned	2024-01-21T20:07:53Z	-
dc.date.available	2024-01-21T20:07:53Z	-
dc.date.created	2022-01-10	-
dc.date.issued	1996-01	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/144760	-
dc.title	100 ㎚ electron beam lithography using a modified scanning electron microscope.	-
dc.type	Article	-
dc.description.journalClass	3	-
dc.identifier.bibliographicCitation	Bulletin of the Korean physical society, v.v. 14, no.no. 2, pp.539 - ?	-
dc.citation.title	Bulletin of the Korean physical society	-
dc.citation.volume	v. 14	-
dc.citation.number	no. 2	-
dc.citation.startPage	539	-
dc.citation.endPage	?	-
dc.subject.keywordAuthor	MOCVD	-

Show Simple Item Record

KIST Library Institutional Repository