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dc.contributor.authorLIE, DYC-
dc.contributor.authorSONG, JH-
dc.contributor.authorNICOLET, MA-
dc.contributor.authorTHEODORE, ND-
dc.date.accessioned2024-01-21T21:01:05Z-
dc.date.available2024-01-21T21:01:05Z-
dc.date.created2021-09-01-
dc.date.issued1995-01-30-
dc.identifier.issn0003-6951-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/145195-
dc.languageEnglish-
dc.publisherAMER INST PHYSICS-
dc.subjectSI1-XGEX-
dc.subjectSTRAIN-
dc.subjectFILMS-
dc.subjectSI-
dc.titleADVANTAGE OF RAPID THERMAL ANNEALING OVER FURNACE ANNEALING FOR P-IMPLANTED METASTABLE SI/GE0.12SI0.88-
dc.typeArticle-
dc.identifier.doi10.1063/1.114023-
dc.description.journalClass1-
dc.identifier.bibliographicCitationAPPLIED PHYSICS LETTERS, v.66, no.5, pp.592 - 594-
dc.citation.titleAPPLIED PHYSICS LETTERS-
dc.citation.volume66-
dc.citation.number5-
dc.citation.startPage592-
dc.citation.endPage594-
dc.description.journalRegisteredClassscie-
dc.description.journalRegisteredClassscopus-
dc.identifier.wosidA1995QD94600020-
dc.relation.journalWebOfScienceCategoryPhysics, Applied-
dc.relation.journalResearchAreaPhysics-
dc.type.docTypeArticle-
dc.subject.keywordPlusSI1-XGEX-
dc.subject.keywordPlusSTRAIN-
dc.subject.keywordPlusFILMS-
dc.subject.keywordPlusSI-
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