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DC PACVD법에 의한 다이아몬드막의 합성

Other Titles

Synthesis of diamond film using DC PACVD

Authors

이재갑; 이욱성; 백영준; 은광용

Issue Date

1994-01

Publisher

대한금속학회

Citation

대한금속학회지, v.32, no.6, pp.742 - 750

Keywords

diamond; DC PACVD; quality; growth rate

URI

https://pubs.kist.re.kr/handle/201004/145669

Appears in Collections:

KIST Article > Others

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