KIST Library Institutional Repository

열영동력이 수평 웨이퍼상의 입자침착에 미치는 영향

Other Titles

Thermophoretic effect on particle deposition toward a horizontal wafer

Authors

배귀남; 박승오; 이춘식; 안이기

Issue Date

1994-01

Publisher

대한기계학회

Citation

대한기계학회논문집 A, v.18, pp.175 - 183

Keywords

particle deposition velocity; 입자침착속도; thermophoresis; 열영동; horizontal wafer; 수평 웨이터

ISSN

1226-4873

URI

https://pubs.kist.re.kr/handle/201004/145869

Appears in Collections:

KIST Article > Others

Files in This Item:

There are no files associated with this item.

Export

RIS (EndNote)

XLS (Excel)

XML