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LPMOCVD 방법에 의한 탄소도핑된 갈륨비소 에피층의 격자 수축 및 임계두께 해석 .

Authors

김성일; 김무성; 민석기

Issue Date

1993-01

Citation

Korean appl. phys., v.v. 6, no.no. 5, pp.365 - 369

Keywords

MOCVD; GaAs; AlGaAs

URI

https://pubs.kist.re.kr/handle/201004/146173

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KIST Article > Others

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