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A study on the structural properties of Rf magnetron sputtered Ba1-xSrxTiO3 thin film

Other Titles

Rf magnetron sputtering 법으로 제조된 Ba1-xSrxTiO3 박막의 구조적 특성에 대한 연구

Authors

김태송; 오명환; 김종희

Issue Date

1993-01

Publisher

한국세라믹학회

Citation

한국세라믹학회지 = Journal of the Korean Ceramic Society, v.30, no.6, pp.441 - 448

Keywords

BST thin film; sputtering process; ITO substrate

ISSN

1229-7801

URI

https://pubs.kist.re.kr/handle/201004/146215

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KIST Article > Others

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