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FAST SOLID-PHASE CRYSTALLIZATION OF AMORPHOUS-SILICON FILMS ON GLASS USING LOW-TEMPERATURE MULTISTEP RAPID THERMAL ANNEALING

Authors

이창우; 이주천; 김용태

Issue Date

1993-01

Publisher

Springer Verlag

Citation

Applied Physics A: Solids and Surfaces, v.56, no.2, pp.2718 - 2721

ISSN

0721-7250

URI

https://pubs.kist.re.kr/handle/201004/146236

DOI

10.1007/BF00517678

Appears in Collections:

KIST Article > Others

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