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실리콘을 이용한 압력센서

Authors

주병권; 오명환

Issue Date

1992-09

Citation

전자부품지, pp.160 - 160

Keywords

MEMS; micromachining; microsensor; pressure sensor

URI

https://pubs.kist.re.kr/handle/201004/146389

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KIST Article > Others

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