Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김태송 | - |
| dc.contributor.author | 오명환 | - |
| dc.contributor.author | 김종희 | - |
| dc.date.accessioned | 2024-01-21T23:14:07Z | - |
| dc.date.available | 2024-01-21T23:14:07Z | - |
| dc.date.created | 2022-01-10 | - |
| dc.date.issued | 1992-01 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/146513 | - |
| dc.title | Fabrication of ceramic thin films by PVD process | - |
| dc.title.alternative | PVD 공정에 의한 세라믹 박막의 제조 | - |
| dc.type | Article | - |
| dc.description.journalClass | 3 | - |
| dc.identifier.bibliographicCitation | Ceramics, v.7, no.3, pp.241 - 247 | - |
| dc.citation.title | Ceramics | - |
| dc.citation.volume | 7 | - |
| dc.citation.number | 3 | - |
| dc.citation.startPage | 241 | - |
| dc.citation.endPage | 247 | - |
| dc.subject.keywordAuthor | ceramics | - |
| dc.subject.keywordAuthor | PVD process | - |
| dc.subject.keywordAuthor | thin films | - |
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