Fabrication of ceramic thin films by PVD process

Other Titles
PVD 공정에 의한 세라믹 박막의 제조
Authors
김태송오명환김종희
Issue Date
1992-01
Citation
Ceramics, v.7, no.3, pp.241 - 247
Keywords
ceramics; PVD process; thin films
URI
https://pubs.kist.re.kr/handle/201004/146513
Appears in Collections:
KIST Article > Others
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