REMOTE PLASMA-ASSISTED OXIDATION OF INP

Authors
LEE, JIKANG, KNBAGLIO, JALIM, HJPARK, HL
Issue Date
1991-09-01
Publisher
CHAPMAN HALL LTD
Citation
JOURNAL OF MATERIALS SCIENCE LETTERS, v.10, no.17, pp.1043 - 1045
Keywords
THERMAL-OXIDATION; OXIDES; INTERFACE; BAND; THERMAL-OXIDATION; OXIDES; INTERFACE; BAND
ISSN
0261-8028
URI
https://pubs.kist.re.kr/handle/201004/146735
DOI
10.1007/BF00721839
Appears in Collections:
KIST Article > Others
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