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dc.contributor.author나종갑-
dc.contributor.author정경태-
dc.contributor.author김영호-
dc.date.accessioned2024-01-22T00:06:03Z-
dc.date.available2024-01-22T00:06:03Z-
dc.date.created2022-01-10-
dc.date.issued1991-01-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/146930-
dc.title박막의 미세조직이 구리박막의 미세선 형성에 미치는 영향 .-
dc.typeArticle-
dc.description.journalClass3-
dc.identifier.bibliographicCitation대한금속학회지, v.v. 29, no.no. 11, pp.1097 - 1104-
dc.citation.title대한금속학회지-
dc.citation.volumev. 29-
dc.citation.numberno. 11-
dc.citation.startPage1097-
dc.citation.endPage1104-
dc.subject.keywordAuthor구리세선-
dc.subject.keywordAuthor스파터링-
dc.subject.keywordAuthor습식화학식각-
dc.subject.keywordAuthor미세조직-
dc.subject.keywordAuthor표면조도-
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