Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김용태 | - |
| dc.contributor.author | 홍종성 | - |
| dc.contributor.author | 홍치유 | - |
| dc.contributor.author | 민석기 | - |
| dc.date.accessioned | 2024-01-22T00:12:49Z | - |
| dc.date.available | 2024-01-22T00:12:49Z | - |
| dc.date.created | 2022-01-10 | - |
| dc.date.issued | 1990-10 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/147043 | - |
| dc.title | 플라즈마 화학증착 텅스텐박막의 증착온도에 따른 비저항 및 결정구조의 변화 . | - |
| dc.type | Article | - |
| dc.description.journalClass | 3 | - |
| dc.identifier.bibliographicCitation | 새물리, v.30, no.5, pp.496 - 500 | - |
| dc.citation.title | 새물리 | - |
| dc.citation.volume | 30 | - |
| dc.citation.number | 5 | - |
| dc.citation.startPage | 496 | - |
| dc.citation.endPage | 500 | - |
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