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플라즈마 화학증착 텅스텐박막의 증착온도에 따른 비저항 및 결정구조의 변화 .

Authors

김용태; 홍종성; 홍치유; 민석기

Issue Date

1990-10

Citation

새물리, v.30, no.5, pp.496 - 500

URI

https://pubs.kist.re.kr/handle/201004/147043

Appears in Collections:

KIST Article > Others

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