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TIC AND TIN COATINGS FORMED ON SI3N4-TIC COMPOSITE CERAMICS BY CHEMICAL VAPOR-DEPOSITION

Authors

KIM, DW; PARK, YJ; LEE, JG; CHUN, JS

Issue Date

1988-11-15

Publisher

ELSEVIER SCIENCE SA LAUSANNE

Citation

THIN SOLID FILMS, v.165, no.1, pp.149 - 161

ISSN

0040-6090

URI

https://pubs.kist.re.kr/handle/201004/147527

DOI

10.1016/0040-6090(88)90686-4

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KIST Article > Others

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