Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 김희중 | - |
dc.contributor.author | 한석희 | - |
dc.contributor.author | 이택동 | - |
dc.contributor.author | 강일구 | - |
dc.date.accessioned | 2024-01-22T01:39:38Z | - |
dc.date.available | 2024-01-22T01:39:38Z | - |
dc.date.created | 2022-01-10 | - |
dc.date.issued | 1986-12 | - |
dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/147821 | - |
dc.title | Influence of sputtering condition on the thin film characteristics in Co-base alloys | - |
dc.title.alternative | 스파터링조건이 코발트계 합금의 박막특성에 미치는 영향 | - |
dc.type | Article | - |
dc.description.journalClass | 3 | - |
dc.identifier.bibliographicCitation | 대한금속학회지, v.24, no.12, pp.1316 - 1322 | - |
dc.citation.title | 대한금속학회지 | - |
dc.citation.volume | 24 | - |
dc.citation.number | 12 | - |
dc.citation.startPage | 1316 | - |
dc.citation.endPage | 1322 | - |
dc.subject.keywordAuthor | sputtering | - |
dc.subject.keywordAuthor | Co alloy | - |
dc.subject.keywordAuthor | thin film | - |
dc.subject.keywordAuthor | 스퍼터링 | - |
dc.subject.keywordAuthor | 코발트계합금 | - |
dc.subject.keywordAuthor | 용질농도 | - |
dc.subject.keywordAuthor | solute concentration | - |
dc.subject.keywordAuthor | 스퍼터율 | - |
dc.subject.keywordAuthor | sputter yield | - |
dc.subject.keywordAuthor | 증착속도 | - |
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