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Influence of sputtering condition on the thin film characteristics in Co-base alloys

Other Titles

스파터링조건이 코발트계 합금의 박막특성에 미치는 영향

Authors

김희중; 한석희; 이택동; 강일구

Issue Date

1986-12

Citation

대한금속학회지, v.24, no.12, pp.1316 - 1322

Keywords

sputtering; Co alloy; thin film; 스퍼터링; 코발트계합금; 용질농도; solute concentration; 스퍼터율; sputter yield; 증착속도

URI

https://pubs.kist.re.kr/handle/201004/147821

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KIST Article > Others

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