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Atomic force microscopic observation in the surface morphologies and roughness of plasma deposited tungsten and tungsten nitride thin films.

Other Titles: Atomic force microscopic observation in the surface morphologies and roughness of plasma deposited tungsten and tungsten nitride thin films.

Authors: Kim Yong Tae; C. S. Kwon; I. H. Choi; C. W. Lee; Min Suk-Ki

Issue Date: 1993-01

URI: https://pubs.kist.re.kr/handle/201004/148978

Appears in Collections:: KIST Publication > Others

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