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Results 1-3 of 3 (Search time: 0.003 seconds).
Item hits:
Issue Date
Title
Author(s)
1994-10
Formation of silicon diaphragm using silicon-wafer direct bonding / electrochemical etch-stopping and its application to silicon pressure sensor fabrication
주병권
;
하병주
;
김근섭
;
송만호
;
김성환
;
김철주
;
차균현
;
오명환
1992-01
Microscopy study for the batch fabrication of silicon diaphragm
하병주
;
주병권
;
차균현
;
오명환
;
김철주
1992-01
Short consideration on the non-uniformities existing at the etched-edges in deep anisotropic etching of (100) silicon
주병권
;
하병주
;
김철주
;
오명환
;
차균현
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-Author
3
김철주
3
오명환
3
주병권
3
차균현
1
김근섭
1
김성환
1
송만호
-Subject
3
MEMS
3
micromachining
2
diaphragm
1
deep silicon etching
1
electrochemical etch stop
1
micromechanical structure
1
pressure sensor
1
silicon etching
1
wafer bonding
-Date issued
1
1994
2
1992
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