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Short consideration on the non-uniformities existing at the etched-edges in deep anisotropic etching of (100) silicon

Other Titles

(100) 실리콘의 깊은 비등방성 식각시 식각면의 가장자리에 존재하는 불균일성의 짤막한 고찰

Authors

주병권; 하병주; 김철주; 오명환; 차균현

Issue Date

1992-01

Citation

한국재료학회지 = Korean Journal of Materials Research, v.2, no.5, pp.383 - 386

Keywords

MEMS; micromachining; deep silicon etching; diaphragm

ISSN

1225-0562

URI

https://pubs.kist.re.kr/handle/201004/146612

Appears in Collections:

KIST Article > Others

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