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Microscopy study for the batch fabrication of silicon diaphragm

Other Titles

실리콘 diaphragm의 일괄 제조공정을 위한 microscopy study

Authors

하병주; 주병권; 차균현; 오명환; 김철주

Issue Date

1992-01

Citation

전자공학회논문지, v.29A, no.1, pp.33 - 40

Keywords

MEMS; micromachining; silicon etching; diaphragm

URI

https://pubs.kist.re.kr/handle/201004/146562

Appears in Collections:

KIST Article > Others

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