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가시광선 광원을 이용한 ITO 박막의 표면 평탄화 방법 및 장치

Author

강준현; 한일기; 권석준; 박준서; 박재관; 고형덕; 강구민; 김영환

Assignee

한국과학기술연구원

Regitration Date

2019-08-19

Registration No.

10-2013787

Application Date

2017-06-08

Application No.

2017-0071494

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/76281

Appears in Collections:

KIST Patent > Others

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