Characterization of nanoporous alumina using terahertz reflectometry and scattering imaging

Abstract

The structure and morphology of nanoporous alumina (NP Al2O3) films on Al substrates are investigated by terahertz (THz) reflectometry and scattering imaging. One inhomogeneous area is identified in THz C-scan results off specular conditions at various angles. The thickness of NP Al2O3 films calculated based on THz results is in excellent agreement with destructive cross-sectional field emission scanning electron microscopy (FE-SEM) measurements.