DSpace at KIST: Inner Trench Type Tungsten Nano Dot Arrays Patterned by Using Diblock Copolymer Templates and Selective Ion Etching

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DSpace at KISTKIST Conference Paper 2006

Inner Trench Type Tungsten Nano Dot Arrays Patterned by Using Diblock Copolymer Templates and Selective Ion Etching

Authors: Park, Min Chul

Issue Date: 2006-06-01

Publisher: IEEE-NANO

Citation: Nanotechnology, 2006. IEEE-NANO 2006. Sixth IEEE Conference on

URI: https://pubs.kist.re.kr/handle/201004/81615

Appears in Collections:: KIST Conference Paper > 2006

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