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Study of PZT degradation during wafer-level bonding of thermo-piezoelectric cantilevers with CMOS wafer for probe-based data storage

Authors

CHO, IL JOO

Issue Date

2006-04-15

Publisher

NTFRL

Citation

18th international symposium on integrated ferroelectrics

URI

https://pubs.kist.re.kr/handle/201004/81932

Appears in Collections:

KIST Conference Paper > 2006

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