KIST Library Institutional Repository

자성　박막　형성을　위한　스파터링　타겟　및　그　제조방법

Author

나종갑

Assignee

한국과학기술연구원

Regitration Date

1999-09-21

Registration No.

5,955,685

Application Date

1997-02-25

Application No.

08/805,742

Country

US

URI

https://pubs.kist.re.kr/handle/201004/82199

Appears in Collections:

KIST Patent > Others

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