A Low Voltage Two-Axis Electromagnetically Actuated Micromirror with Bulk Silicon Mirror Plates and Torsion Bars

Authors
CHO, IL JOO
Issue Date
2002-01-15
Publisher
IEEE
Citation
Proceedings of IEEE the 15th International Conference on MEMS, pp.540 - 543
URI
https://pubs.kist.re.kr/handle/201004/83317
Appears in Collections:
KIST Conference Paper > 2002
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