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A Low Voltage Two-Axis Electromagnetically Actuated Micromirror with Bulk Silicon Mirror Plates and Torsion Bars

Authors

CHO, IL JOO

Issue Date

2002-01-15

Publisher

IEEE

Citation

Proceedings of IEEE the 15th International Conference on MEMS, pp.540 - 543

URI

https://pubs.kist.re.kr/handle/201004/83317

Appears in Collections:

KIST Conference Paper > 2002

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