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Atomic Force Microscope Probe Tips Using Heavily Boron-Doped Silicon Cantilevers Realized in a <110> Bulk Silicon Wafer

Authors

CHO, IL JOO

Issue Date

2000-07-15

Publisher

IEEE

Citation

Proceedings of International Microprocesses and Nanotechnology Conference, pp.230 - 231

URI

https://pubs.kist.re.kr/handle/201004/84353

Appears in Collections:

KIST Conference Paper > 2000

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