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입방정질화붕소 박막증착방법

Author

백영준; 이욱성; 박종극

Assignee

한국과학기술연구원

Regitration Date

2010-10-28

Registration No.

10-0991770

Application Date

2010-03-15

Application No.

2010-22966

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/89811

Appears in Collections:

KIST Patent > 2010

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