Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Jin Chang Kyu | - |
| dc.contributor.author | Do Kyung Hwang | - |
| dc.contributor.author | Tae-Hwan Kimb | - |
| dc.contributor.author | CHOI, WON-KOOK | - |
| dc.date.accessioned | 2024-01-12T16:04:46Z | - |
| dc.date.available | 2024-01-12T16:04:46Z | - |
| dc.date.created | 2021-09-29 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/91095 | - |
| dc.language | English | - |
| dc.subject | Multilayer barrier film | - |
| dc.subject | PECVD (Plasma Enhanced Chemical Vapor Deposition) | - |
| dc.subject | ALD(Atomic Layer Deposition) | - |
| dc.subject | Barrier film | - |
| dc.subject | WVTR (Water Vapor Transmission Rate) | - |
| dc.title | Multilayer barrier film fabricated by Plasma Enhanced Chemical Vapor Deposition and Atomic Layer Deposition | - |
| dc.type | Conference | - |
| dc.description.journalClass | 2 | - |
| dc.identifier.bibliographicCitation | 한국진공학회 | - |
| dc.citation.title | 한국진공학회 | - |
| dc.citation.conferencePlace | KO | - |
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