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Multilayer barrier film fabricated by Plasma Enhanced Chemical Vapor Deposition and Atomic Layer Deposition

Authors

Jin Chang Kyu; Do Kyung Hwang; Tae-Hwan Kimb; CHOI, WON-KOOK

Citation

한국진공학회

Keywords

Multilayer barrier film; PECVD (Plasma Enhanced Chemical Vapor Deposition); ALD(Atomic Layer Deposition); Barrier film; WVTR (Water Vapor Transmission Rate)

URI

https://pubs.kist.re.kr/handle/201004/91095

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KIST Conference Paper > Others

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