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Effect of hydrogen addition on the residual stress of cubic boron nitride film prepared by R.F. magnetron sputtering of B4C target

Authors

JONG-KEUK, PARK; Ko Ji sun; Lee, Wook Seong; Baik, Young Joon

Citation

ICMCTF-2012

URI

https://pubs.kist.re.kr/handle/201004/95164

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KIST Conference Paper > Others

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