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FREQUENCY EFFECT OF MULTI HOLE RF CCP DISCHARGE

Authors

Hun-su Lee; Yun-Seong Lee; Sang-Hun Seo; Hong-Young Chang

Citation

IFFM2011

Keywords

Hollow cathode; plasma density; frequency; multi hole electrode

URI

https://pubs.kist.re.kr/handle/201004/97450

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KIST Conference Paper > Others

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