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The characteristics changing of HfInZnO TFT with process conditions by RF sputter

Other Titles

스퍼터를 이용한 공정 조건에 따른 HfInZnO TFT 특성변화

Authors

Jung Da Woon; Chong Eu Gene; Kim Seung Han; Chun Yoon Soo; Lee Sang Yeol

Citation

한국전기전자재료학회 추계학술대회, pp.34

URI

https://pubs.kist.re.kr/handle/201004/99047

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KIST Conference Paper > Others

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