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Fabrication of superhydrophobic Si nanowire patterned surfaces using CF4 plasma

Authors

Her Eun kyu; Cha Tae-Gon; Myoung-Woon Moon; Lee, Kwang Ryeol; 오규환; 김호영

Citation

International Symposium on Nature Inspired Technology(ISNIT2010)

Keywords

si nanowire; plasma; nanopattern; biomimetic; superhydrophobic; PACVD; Si nanowire; hierarchical structure

URI

https://pubs.kist.re.kr/handle/201004/99064

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KIST Conference Paper > Others

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