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Monolithic film bulk acoustic wave resonator using SOI wafer

Other Titles

SOI 웨이퍼를 이용한 압전박막공진기 제작

Authors

김인태; 박윤권; 이시형; 이윤희; 이전국; 김남수; 주병권

Issue Date

2002-12

Citation

전기전자재료학회논문지 = Journal of the Korean Institute of Electrical and Electronic Material Eng, v.15, no.12, pp.1039 - 1044

Keywords

FBAR; piezoelectric; SOI; MMIC; membrane

URI

https://pubs.kist.re.kr/handle/201004/138998

Appears in Collections:

KIST Article > 2002

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