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Fabrication of 3-Dimensional Microstructures for Bulk Micromachining by SDB and Electrachemical Etch-Stop

Other Titles

SDB와 전기화학적 식각정지에 의한 벌크 마이크로머신용 3차원 미세구조물 제작

Authors

정귀상; 김재민; 윤석진

Issue Date

2002-11

Citation

전기전자재료학회논문지, v.15, no.11, pp.958 - 962

Keywords

free-standing microstructure; Micromachining; SDB; SOI; Electrachemical etch-stop; DRIE

URI

https://pubs.kist.re.kr/handle/201004/139072

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KIST Article > 2002

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