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Optical MEMS-MEMS 기술의 엑츄에이터 응용 (I)( 광통신 부품을 중심으로 )

Authors

문성욱

Issue Date

2002-09

Citation

Semiconductor Monthly, v.175, pp.91 - 99

Keywords

MEMS

URI

https://pubs.kist.re.kr/handle/201004/139228

Appears in Collections:

KIST Article > 2002

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