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Origin of trace organic contaminants adsorbed on the surface of silicon wafers in a manufacturing line

Authors

Park, HM; Kim, YM; Cheong, CS; Ryu, JC; Lee, DW; Lee, KB

Issue Date

2002-04

Publisher

JAPAN SOC ANALYTICAL CHEMISTRY

Citation

ANALYTICAL SCIENCES, v.18, no.4, pp.477 - 479

Keywords

silicon wafers; anion analysis; ion chromatography; environmental analysis

ISSN

0910-6340

URI

https://pubs.kist.re.kr/handle/201004/139673

DOI

10.2116/analsci.18.477

Appears in Collections:

KIST Article > 2002

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