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The control of the structure and properties of tetrahedral amorphous carbon films prepared by filtered vacuum arc

Other Titles

FVA 증착법에 의해 합성된 ta-C 박막의 구조 및 물성 제어

Authors

이철승; 신진국; 김종국; 이광렬; 윤기현

Issue Date

2002-01

Citation

Journal of the Korean Vacuum Society = 한국진공학회, v.11, no.1, pp.8 - 15

Keywords

ta-C

URI

https://pubs.kist.re.kr/handle/201004/139859

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KIST Article > 2002

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