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Fabrication of Al/PZT/RuO2 micro cantilever system and computer simulation of resonant characteristics

Other Titles

Al/PZT/RuO2 마이크로 캔틸레버의 제작과 공진 특성 전산모사

Authors

유웅현; 정용재; 홍경일; 최덕균; 김태송

Issue Date

2001-07

Publisher

한국세라믹학회

Citation

한국세라믹학회지 = Journal of the Korean Ceramic Society, v.38, no.7, pp.634 - 638

Keywords

micro cantilever

ISSN

1229-7801

URI

https://pubs.kist.re.kr/handle/201004/140339

Appears in Collections:

KIST Article > 2001

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